FEINMETALL MEMS probe cards are using latest production processes to obtain the solid MEMS beams used for contacting even smallest pitches in high-current applications. Compatibility with our well-established probe card setup is thereby guaranteed and ensures a reliable functionality. It is the optimal addition to our product range, especially developed to contact small pitch copper pillars and aluminum pads.
MμProbe® - SOC
MμProbe® - GPU
|Contact elements:||M, N for copper pillars and R, U for pads|
|Pitch:||80 μm array for copper pillars and 50 μm for pads|
|Beam count:||more than 12 000|
|Active area:||up to 100 mm x 100 mm|
|Temperature range:||- 55 °C to 200 °C|